Below you will find pages that utilize the taxonomy term “Automated” Automated wafer drying heater The spin-dry cycle cuts off, and the wafer’s still wet. A standard heater takes too long to settle, and the chuck temperature drifts across the... Read more...
Automated wafer drying heater The spin-dry cycle cuts off, and the wafer’s still wet. A standard heater takes too long to settle, and the chuck temperature drifts across the... Read more...